Drexel BlueLine -- virtually all electronic resources in one location!
Drexel University      College of Engineering      Drexel.edu Site Map      Search Drexel.edu      Go
Skip Navigation Links
Home
Prospective Students
Current Students
News
Get Involved
People
Research
Safety
Contact Us
This website is no longer being maintained. For the latest news, events, and information, please visit http://www.materials.drexel.edu/.
Skip Navigation LinksHome > News > Spanier Co-PI on $1.1M NSF Grant

Spanier Co-PI on $1.1M NSF Grant

 Spanier

Associate professor Jonathan Spanier is a Co-PI on a joint National Science Foundation (NSF) project to improve Drexel's Microfabrication Facility (MFF).  

Professor Moses Noh (PI, Associate Professor of Mechanical Engineering and Mechanics), along with co-PIs Professors Kenneth Barbee (Associate Professor in the School of Biomedical Engineering, Science and Health Systems), Jason Baxter (Assistant Professor of Chemical and Biological Engineering), Spanier, and Ying Sun (Assistant Professor of Mechanical Engineering and Mechanics) have received a $1.1M three-year award for their project “Upgrade and Renovation of Drexel Microfabrication Facility.”
 
This effort seeks to upgrade and renovate the MFF to support rapidly growing sponsored and unsponsored research activities and to facilitate the integration of researchers. The MFF currently houses a number of microfabrication instruments such as a mask aligner, inductively-coupled plasma etcher, e-beam/filament evaporators, and an optical profilometer.  However, currently this facility is not a classified cleanroom facility, which is essential for micro- and nanofabrication processes.  The project will include upgrading of the MFF to a cleanroom (Photolithography Area - Class 100, General Process Area - Class 1000), expanding of Gowning/Maintenance/Storage Area, and the installation of state-of-the-art cleanroom fixtures. 


Added on Tuesday, August 10, 2010

Print This Article




Support Materials Education @ Drexel



Last updated Monday, March 23, 2009.